SiCarrier’s Ambitious Roadmap: ASML-Compatible Tools Set for 2026 Launch

SiCarrier unveiled its roadmap at SEMICON China, planning ASML-compatible lithography machines for 2026. Collaborating with several fabs, it aims for commercial orders by late 2025. The company, established in 2022, focuses on R&D expansion and already services key clients like SMIC. Recently, SiCarrier patented technology for 5nm chips using DUV tools.
SiCarrier made a significant impact at SEMICON China by detailing its future product roadmap. The Chinese chip equipment manufacturer plans to launch lithography machines compatible with ASML and Applied Materials for 300-mm wafers at 28nm by 2026. This advancement aims to meet the needs of domestic fabs, according to Market Director Zhao Min.
The firm is collaborating with several fabs to create joint labs, with expectations to announce commercial orders by Q4 of 2025, as per CTO Chen Dong. SiCarrier’s clients include notable Chinese foundries like SMIC and Hua Hong Group, with existing etching machines for power semiconductor lines already in production.
Since its founding in 2022, SiCarrier has initiated plans to expand R&D centers to over ten cities and establish service facilities in Europe and Southeast Asia. The company boasts a strong leadership team, including Dai Jun, who also oversees part of China’s Big Fund II and holds a board position at SMIC, enhancing its credibility as a state-backed semiconductor equipment developer working with Huawei.
Notably, SiCarrier received attention for patenting a method to create 5nm chips using DUV tools, a significant development linked to Huawei’s Mate 60 Pro 7nm chip. Despite not displaying its lithography machines, SiCarrier presented a broad spectrum of semiconductor manufacturing equipment, aligning with the industry’s needs for metrology, inspection, and testing, as noted by Tom’s Hardware.
SiCarrier is making strides in the semiconductor equipment sector with plans for ASML-compatible lithography machines by 2026, targeting domestic fabs. Its strategic collaborations and extensive range of equipment underscore its ambition to become a significant player in the industry. The firm’s leadership and recent technological breakthroughs further enhance its credibility and potential for future growth.
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